Energy-dispersive X-ray spectroscopy (abbreviated as both EDS and EDX analysis) is a powerful analytical technique used to identify and quantify the elemental composition of materials. It is a non-destructive method that is commonly used in conjunction with scanning electron microscopy (SEM). EDS analysis enables researchers and analysts to obtain valuable information about the chemical composition of a sample at the macro, micro, or nanoscale.
The EDS analysis process involves exposing a sample with a focused electron beam, which results in the emission of characteristic X-rays from the atoms within the sample. Each element in the sample emits X-rays at specific energy levels, which are unique to that element. By detecting and analyzing these emitted X-rays, energy-dispersive X-ray spectroscopy can determine the presence and relative abundance of elements within the sample.